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Article
Modeling Laser-Assisted Particle Removal Using Molecular Dynamics
Applied Physics A (2003)
  • K. M. Smith, Florida State University
  • M. Y. Hussaini, Florida State University
  • L. D. Gelb, Washington University
  • S. D. Allen, Florida State University
Abstract
Laser-assisted particle removal, a method of cleaning nano- to micro-scale particles from surfaces, was modeled using molecular dynamics. A two-dimensional molecular model consisting of substrate, particle, and adsorbed fluid was used. In order to obtain statistical accuracy of cleaning efficiencies, over 1200 particle-removal simulations were conducted. The effects of fluid thickness and substrate temperature were both considered, and good qualitative agreement with experimental results was obtained. The molecular dynamics approach is shown to be an effective way to study these systems.
Keywords
  • molecular dynamic,
  • substrate temperature,
  • molecular model,
  • statistical accuracy,
  • qualitative agreement
Publication Date
December, 2003
DOI
https://doi.org/10.1007/s00339-003-2220-7
Citation Information
K. M. Smith, M. Y. Hussaini, L. D. Gelb and S. D. Allen. "Modeling Laser-Assisted Particle Removal Using Molecular Dynamics" Applied Physics A Vol. 77 Iss. 7 (2003) p. 877 - 882 ISSN: 0947-8396
Available at: http://works.bepress.com/susan_davis_allen/59/