Article
A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction
Journal of Computational and Theoretical Nanoscience
(2007)
Abstract
Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.
Keywords
- laser cleaning,
- molecular simulations,
- particle contamination,
- semiconductor manufacturing
Disciplines
Publication Date
May, 2007
DOI
https://doi.org/10.1166/jctn.2007.2332
Citation Information
Betul Unlusu, Kayne M. Smith, M. Yousuff Hussaini, Lev D. Gelb, et al.. "A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction" Journal of Computational and Theoretical Nanoscience Vol. 4 Iss. 3 (2007) p. 488 - 493 ISSN: 1546-1955 Available at: http://works.bepress.com/susan_davis_allen/45/