ArF excimer laser-induced photolytic chemical vapor deposition of W on etched Si substrates using tungsten hexafluoride has been studied. Our experimental results show that tungsten film thickness is proportional to the laser irradiation time and fluence, and that the deposition rate initially increases, then decreases with increasing WF6 pressure. the activation energy obtained from an arrhenius plot is much less than that for conventional CVD. a deposition mechanism has been proposed which yields results in good agreement with the experimental dat A. the absorption cross section of WF6 is determined to be 2.75xl0-18 cm2/molecule.