Article
A 4+1 Phase Shifting Algorithm for Rotating-compensator Spectroscopic Ellipsometry
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
(2014)
Abstract
A 4+1 phase shifting algorithm is proposed for rotating-compensator spectroscopic ellipsometry (RCSE). The spectroscopic ellipsometric parameters are determined with five spectra, taken when the compensator is rotated at the detection angles of 0°, 45°, 90°, 135°, and an additional detection angle of 22.5°. There is no need to take the dark spectrum of the spectrometer for error correction using the new method, compared to Lee’s method [2] which also utilizes five spectra for RCSE. It also indicates the algorithm designed to suppress the second harmonic frequency component in traditional phase shifting algorithm is helpful to determine both fundamental and second harmonic frequency components. By taking an additional spectrum, both the two harmonic frequency components of spectra in RCSE are determined by the designed 4+1 phase shifting algorithm.
Publication Date
September 18, 2014
DOI
10.1117/12.2069518
Citation Information
Zhi-gang Han, Zhi Xu and Lei Chen. "A 4+1 Phase Shifting Algorithm for Rotating-compensator Spectroscopic Ellipsometry" 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment Vol. 9282 (2014) Available at: http://works.bepress.com/zhi-xu/2/