Understanding the dynamics and accumulation of embedded charge in dielectric materials is paramount for many applications from HVDC power transmission to spacecraft charging. The pulsed electroacoustic (PEA) method allows for nondestructive measurements of embedded charge distributions in dielectrics. The spatial resolution of PEA measurements are typically ~10 μm. However, some of the most deleterious spacecraft charging events result from electron fluxes with 10 keV to 50 keV energies, resulting in electron ranges of 1's to 10's of μm. Due to the resolution of the PEA method and the superposition of the interfacial charge with the deposited charge distribution, it is difficult to measure charge deposited at these critical energies. A novel analysis method is proposed to measure these shallow charge distributions.