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Article
Polycrystalline Si1-xGex Thin Film Deposition by Rapid Thermal Chemical Vapor Deposition
Journal of Materials Science: Materials in Electronics
  • Young-Bae Park
  • Young-Woo Choi
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
1-1-2006
Document Type
Article
Citation Information
Young-Bae Park, Young-Woo Choi and Xiaodong Li. "Polycrystalline Si1-xGex Thin Film Deposition by Rapid Thermal Chemical Vapor Deposition" Journal of Materials Science: Materials in Electronics Vol. 17 Iss. 1 (2006) p. 27 - 33
Available at: http://works.bepress.com/xiaodong_li/93/