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Article
Nano/Micro-Mechanical and Tribological Characterization of Ar, C, N, and Ne Ion-Implanted Si
Journal of Materials Research
  • Zhi-Hui Xu
  • Young-Bae Park
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
5-1-2010
Document Type
Article
Citation Information
Zhi-Hui Xu, Young-Bae Park and Xiaodong Li. "Nano/Micro-Mechanical and Tribological Characterization of Ar, C, N, and Ne Ion-Implanted Si" Journal of Materials Research Vol. 25 Iss. 5 (2010) p. 880 - 889
Available at: http://works.bepress.com/xiaodong_li/92/