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Article
Metrology in a Scanning Electron Microscope: Theoretical Developments and Experimental Validation
Measurement Science and Technology
  • Michael A. Sutton, University of South Carolina - Columbia
  • Ning Li, University of South Carolina - Columbia
  • Dorian Garcia
  • Nicolas Cornille
  • Jean Jose Orteu
  • Stephen R. McNeil
  • Hubert W. Schreier
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
8-31-2006
Document Type
Article
Citation Information
Michael A. Sutton, Ning Li, Dorian Garcia, Nicolas Cornille, et al.. "Metrology in a Scanning Electron Microscope: Theoretical Developments and Experimental Validation" Measurement Science and Technology Vol. 17 Iss. 10 (2006) p. 2613
Available at: http://works.bepress.com/xiaodong_li/80/