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Article
Interfacial Modification of Amorphous Substrates for Microcrystalline Silicon Growth with in situ Hydrogen Plasma Pretreatment
Physica Status Solidi (a)
  • Young-Bae Park
  • Shi-Woo Rhee
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
10-1-2005
Document Type
Article
Citation Information
Young-Bae Park, Shi-Woo Rhee and Xiaodong Li. "Interfacial Modification of Amorphous Substrates for Microcrystalline Silicon Growth with in situ Hydrogen Plasma Pretreatment" Physica Status Solidi (a) Vol. 202 Iss. 13 (2005) p. 2448 - 2453
Available at: http://works.bepress.com/xiaodong_li/64/