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Article
Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices
Journal of Materials Research
  • harat Bhushan
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
1-1-1997
Document Type
Article
Citation Information
harat Bhushan and Xiaodong Li. "Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices" Journal of Materials Research Vol. 12 Iss. 1 (1997) p. 54 - 63
Available at: http://works.bepress.com/xiaodong_li/50/