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Article
Micro/Nanomechanical Characterization of Ceramic Films for Microdevices
Thin Solid Films
  • Xiaodong Li, University of South Carolina - Columbia
  • Bharat Bhushan
Publication Date
2-26-1999
Document Type
Article
Citation Information
Xiaodong Li and Bharat Bhushan. "Micro/Nanomechanical Characterization of Ceramic Films for Microdevices" Thin Solid Films Vol. 340 Iss. 1-2 (1999) p. 210 - 217
Available at: http://works.bepress.com/xiaodong_li/40/