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Article
Structural Characterization of Silicon Films Deposited at Low Temperature by Remote Plasma Enhanced Chemical Vapor Deposition
Materials Letters
  • Xiaodong Li, University of South Carolina - Columbia
  • Young-Bae Park
  • Dong-Hwan Kim
  • Shi-Woo Rhee
Publication Date
6-1-1995
Document Type
Article
Citation Information
Xiaodong Li, Young-Bae Park, Dong-Hwan Kim and Shi-Woo Rhee. "Structural Characterization of Silicon Films Deposited at Low Temperature by Remote Plasma Enhanced Chemical Vapor Deposition" Materials Letters Vol. 24 Iss. 1-3 (1995) p. 79 - 83
Available at: http://works.bepress.com/xiaodong_li/19/