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Article
Mechanical Characterization of Ultra-Thin Fluorocarbon Films Deposited by R.F. Magnetron Sputtering
Carbon
  • Guangze Tang
  • Xinxin Ma
  • Mingren Sun
  • Xiaodong Li, University of South Carolina - Columbia
Publication Date
1-1-2005
Document Type
Article
Abstract
Fluorocarbon films were deposited on silicon substrate by R.F. magnetron sputtering using a polytetrafluoroethylene (PTFE) target. Structure of the deposited films was studied by X-ray photoelectron spectroscopy (XPS). Hardness, elastic modulus and scratch resistance were measured using a nanoindenter with scratch capability. –CFx (x = 1, 2, 3) and C–C units were found in the deposited fluorocarbon films. The hardness and elastic modulus of the films are strongly dependent on the R.F. power and deposition pressure. The film hardness is in the range from 0.8 GPa to 1.3 GPa while the film elastic modulus is in the range from 8 GPa to 18 GPa. Harder films exhibit higher scratch resistance. Differences in nanoindentation behavior between the deposited fluorocarbon films, diamond-like carbon (DLC) films and PTFE were discussed. The fluorocarbon films should find more applications in the magnetic storage and micro/nanoelectromechanical systems.
Citation Information
Guangze Tang, Xinxin Ma, Mingren Sun and Xiaodong Li. "Mechanical Characterization of Ultra-Thin Fluorocarbon Films Deposited by R.F. Magnetron Sputtering" Carbon Vol. 43 Iss. 2 (2005) p. 345 - 350
Available at: http://works.bepress.com/xiaodong_li/143/