Top-Down Structure and Device Fabrication using In Situ NanomachiningApplied Physics Letters
AbstractWe demonstrate the potential of an alternative tool for the fabrication of nanoscale structures and devices. A nanoindenter integrated with an atomic force microscope is shown to be a powerful machine tool for cutting precise length nanowires or nanobelts and for manipulating the shortened wires. We also demonstrate its utility in cutting grooves and fabricating dents (or periodic arrays of dents) in ZnSnanobelts. This approach permits the direct mechanical machining of nanodevices that are supported on a substrate without the inherent complications of e beam or photolithography.
Citation InformationXiaodong Li, Xinnan Wang, Qihua Xiong and Peter C. Eklund. "Top-Down Structure and Device Fabrication using In Situ Nanomachining" Applied Physics Letters Vol. 87 Iss. 23 (2005) p. #233113
Available at: http://works.bepress.com/xiaodong_li/12/