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Top-Down Structure and Device Fabrication using In Situ Nanomachining
Applied Physics Letters
  • Xiaodong Li, University of South Carolina - Columbia
  • Xinnan Wang
  • Qihua Xiong
  • Peter C. Eklund
Publication Date
Document Type
We demonstrate the potential of an alternative tool for the fabrication of nanoscale structures and devices. A nanoindenter integrated with an atomic force microscope is shown to be a powerful machine tool for cutting precise length nanowires or nanobelts and for manipulating the shortened wires. We also demonstrate its utility in cutting grooves and fabricating dents (or periodic arrays of dents) in ZnSnanobelts. This approach permits the direct mechanical machining of nanodevices that are supported on a substrate without the inherent complications of e beam or photolithography.
Citation Information
Xiaodong Li, Xinnan Wang, Qihua Xiong and Peter C. Eklund. "Top-Down Structure and Device Fabrication using In Situ Nanomachining" Applied Physics Letters Vol. 87 Iss. 23 (2005) p. #233113
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