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Article
Laser-Assisted Wet Etching of Quartz Crystal Resonators
IEEE\/ASME Journal of Microelectromechanical Systems (2018)
  • William Clower, Louisiana Tech University
  • Ville Kaajakari, Louisiana Tech University
  • Chester G. Wilson, Louisiana Tech University
Publication Date
February 1, 2018
DOI
10.1109/JMEMS.2017.2785620
Citation Information
William Clower, Ville Kaajakari and Chester G. Wilson. "Laser-Assisted Wet Etching of Quartz Crystal Resonators" IEEE\/ASME Journal of Microelectromechanical Systems Vol. 27 Iss. 1 (2018) p. 22 - 24
Available at: http://works.bepress.com/william-clower/1/