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Article
Parameter Identification for Semiconductor Diodes by LBIC Imaging
SIAM Journal on Applied Mathematics
  • Weifu Fang, Wright State University - Main Campus
  • Kazufumi Ito
  • David A. Redfern
Document Type
Article
Publication Date
7-1-2002
Abstract

Laser-beam-induced-current (LBIC) imaging is a nondestructive technique used for the characterization of the electrical structure within a semiconductor. In this paper a model is formulated for this technique using the standard drift-diffusion model, and, subsequently, an approximate version and its dual are derived for the study of the inverse problem. The formulation is then applied to a cross-sectional model for n-on-p devices of finite depth to study in detail the relation between the LBIC images and the device parameters. Numerical methods are developed for the simulation of the LBIC image of a diode as well as for the identification of parameters from the LBIC image by least-squares formulation. Numerical examples are presented to illustrate the success of identifying parameters such as junction depth, diffusion length, and equilibrium potential of an abrupt p-n junction diode from its LBIC image. The differentiability of the image with respect to the parameters also is established.

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This work is licensed under a Creative Commons Attribution 4.0 International License.
Citation Information
Weifu Fang, Kazufumi Ito and David A. Redfern. "Parameter Identification for Semiconductor Diodes by LBIC Imaging" SIAM Journal on Applied Mathematics Vol. 62 Iss. 6 (2002) p. 2149 - 2174 ISSN: 0036-1399
Available at: http://works.bepress.com/weifu_fang/33/