Article
Modeling and Analysis for Laser Beam Induced Current Images in Semiconductors
SIAM Journal on Applied Mathematics
Document Type
Article
Publication Date
2-1-1993
Abstract
A mathematical model is developed for the new nondestructive optical technique called laser-beam-induced currents (LBIC), which can be used to detect electrically active regions and defects in semiconductors. The wellposedness of the model equations is shown, and an approximate model that simplifies the numerical implementation of the identification problem is obtained. Some numerical results are presented to show that the approximate model preserves the significant features that the LBIC technique has been experimentally shown to possess.
DOI
10.1137/0153012
Citation Information
Weifu Fang, Stavros Busenberg and Kazufumi Ito. "Modeling and Analysis for Laser Beam Induced Current Images in Semiconductors" SIAM Journal on Applied Mathematics Vol. 53 Iss. 1 (1993) p. 187 - 204 ISSN: 0036-1399 Available at: http://works.bepress.com/weifu_fang/24/
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