Article
Identifiability of Semiconductor Defects From LBIC Images
SIAM Journal on Applied Mathematics
Document Type
Article
Publication Date
12-1-1992
Abstract
The identifiability of defects in a semiconductor from its laser-beam-induced current (LBIC) image is studied. It is shown that the LBIC technique is reliable for detecting any spatial defects in the semiconductor material. Continuous dependence of the current measurements on the spatial defects is proved, and sensitivity is also discussed in certain cases.
DOI
10.1137/0152093
Citation Information
Weifu Fang and Kazufumi Ito. "Identifiability of Semiconductor Defects From LBIC Images" SIAM Journal on Applied Mathematics Vol. 52 Iss. 6 (1992) p. 1611 - 1626 ISSN: 0036-1399 Available at: http://works.bepress.com/weifu_fang/16/
This work is licensed under a Creative Commons Attribution 4.0 International License.