"Evaluation of the Silicon on Glass Microfabrication Process for MEMS Accelerometers" by Thomas White

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Evaluation of the Silicon on Glass Microfabrication Process for MEMS Accelerometers

The International Journal of Modern Engineering (2014)

Thomas White
Kevin Petsch
Dr. Tolga Kaya, Sacred Heart University

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Disciplines

Engineering

Publication Date

2014

Citation Information

Thomas White, Kevin Petsch and Tolga Kaya. "Evaluation of the Silicon on Glass Microfabrication Process for MEMS Accelerometers" The International Journal of Modern Engineering (2014)
Available at: http://works.bepress.com/tolga-kaya/13/