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Article
The fabrication and characterization of granular aluminium/palladium bilayer microbolometers
Physics Faculty Research
  • Thomas E. Wilson, Marshall University
Document Type
Article
Publication Date
7-1-2007
Abstract
Superconducting granular aluminium/palladium bilayer microbolometers with subnanosecond response can be easily fabricated using an all lift-off process with image-reversal lithography. The palladium capping layer allows for convenient and reproducible Ohmic contacts to be made to the device. We report their fabrication, resistance–current calibration, responsivity and response time. Finally, a deconvolution algorithm is used to improve the time resolution to approximately 1 ns while obtaining the incident photon and phonon fluxes in both direct photoexcitation and phonon heat pulse experiments.
Comments

This article first appeared in the July 2007 issue of Measurement Science and Technology and is reprinted with permission. A final version can be found at http://iopscience.iop.org/0957-0233/18/7/N04

©2007 IOP Publishing

Citation Information
Wilson TE. The fabrication and characterization of granular aluminium/palladium bilayer microbolometers. Meas Sci Technol. 2007; 18(7): N53-N59.