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Presentation
Fabrication processes for atom-scale FETs, cellular automata and quantum computers
All Physics Faculty Publications
  • T. -C. Shen, Utah State University
Document Type
Presentation
Publication Date
11-30-1999
Citation Information
Talk at International Symposium on Surface Science for Micro- and Nano-device fabrication ( ISSS-3), Waseda University, Japan, 11/30/99. (Invited) “Fabrication processes for atom-scale FETs, cellular automata and quantum computers”