Article
Metal silicide patterning: a new approach to silicon nanoelectronics
Nanotechnology
(1996)
Keywords
- metal silicide,
- patterning,
- nanoelectronics
Publication Date
January 1, 1996
Citation Information
J. R. Tucker, C. Wang and T.-C. Shen,"Metal silicide patterning: a new approach to silicon nanoelectronics," Nanotechnology 7, 275 (1996).