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Presentation
Fabrication and electrical characterization of 2D dopant nanostructures in Si
All Physics Faculty Publications
  • J. S. Kline
  • K. C. Kim
  • S. J. Robinson
  • K. -F. Chen
  • R. Chan
  • M. Feng
  • J. R. Tucker
  • J. -Y. Ji
  • T. -C. Shen, Utah State University
  • C. Yang
  • R. -R. Du
Document Type
Presentation
Publication Date
11-4-2003
Citation Information
Talk at 50th International Symposium of AVS, Baltimore, MD, 11/4/2003. “Fabrication and electrical characterization of 2D dopant nanostructures in Si,” presented by J. S. Kline, K. C. Kim, S. J. Robinson, K.-F. Chen, R. Chan, M. Feng, J. R. Tucker, J.-Y. Ji, T.-C. Shen, C. Yang, R.-R. Du.