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Article
Silicon nanofabrication and chemical modification by UHV-STM
Materials Research Society Proceedings (1995)
  • J. W. Lyding
  • T. -C. Shen, Utah State University
  • G. C. Abeln
  • C. Wang
  • E. T. Foley
  • J. R. Tucker
Keywords
  • silicon,
  • nanofabrication,
  • chemical modification
Publication Date
January 1, 1995
Citation Information
J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, E. T. Foley, and J. R. Tucker, "Silicon nanofabrication and chemical modification by UHV-STM," Mat. Res. Soc. Symp. Proc. 380, 187 (1995).