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Presentation
Selective deposition of Al on H/Si(100) surfaces
All Physics Faculty Publications (1996)
  • T. -C. Shen, Utah State University
Keywords
  • deposition,
  • silicon,
  • surfaces
Publication Date
December 5, 1996
Citation Information
Talk at MRS 1996 Fall meeting, Boston, 12/5/96. “Selective deposition of Al on H/Si(100) surfaces”