Skip to main content
Article
Nanoscale STM-patterning and chemical modification of the Si(100) surface
Microelectronic Engineering (1995)
  • G. C. Abeln
  • T. -C. Shen, Utah State University
  • J. R. Tucker
  • J. W. Lyding
Keywords
  • nanoscale,
  • STM,
  • shemical modification
Publication Date
January 1, 1995
Citation Information
G. C. Abeln, T.-C. Shen, J. R. Tucker, and J. W. Lyding, "Nanoscale STM-patterning and chemical modification of the Si(100) surface," Micro. Eng. 27, 23 (1995).