Article
Ultrahigh vacuum scanning tunneling microscope-based nanolithography and selective chemistry on silicon surfaces
Isreal Journal of Chemistry
(1996)
Keywords
- vacuum scanning,
- tunneling microscope,
- nanolithography,
- silicon surface
Publication Date
January 1, 1996
Citation Information
J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, P. A. Scott, J. R. Tucker, P. Avouris, and R. E. Walkup, “Ultrahigh vacuum scanning tunneling microscope-based nanolithography and selective chemistry on silicon surfaces,” Israel J. of Chem. 36, 3 (1996).