Presentation
Surface morphology and nanolithography on NH4F etched Si(111)
All Physics Faculty Publications
(1998)
Keywords
- surface,
- morphology,
- nanolithography,
- silicon
Publication Date
March 18, 1998
Citation Information
Talk at APS March Meeting, Los Angeles, 3/18/98. “Surface morphology and nanolithography on NH4F etched Si(111)”