Article
Nanoscale patterning and selective chemistry of silicon surfaces by ultrahigh-vacuum scanning tunneling microscopy
Nanotechnology
(1996)
Keywords
- nanoscale,
- patterning,
- selective chemistry,
- tunneling,
- microscopy
Publication Date
January 1, 1996
Citation Information
J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, and J. R. Tucker, "Nanoscale patterning and selective chemistry of silicon surfaces by ultrahigh-vacuum scanning tunneling microscopy," Nanotechnology 7, 128 (1996).