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Presentation
Selective deposition of Al on H/Si(001) surfaces by CVD
All Physics Faculty Publications (1998)
  • T. -C. Shen, Utah State University
Keywords
  • selective deposition,
  • silicon,
  • CVD
Publication Date
May 28, 1998
Citation Information
Talk at International Symposium on Nanoscale Modification of Surfaces, Krakow, Poland, 5/28/98. (Plenary) “Selective deposition of Al on H/Si(001) surfaces by CVD”