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Presentation
Growth and electrical characterization of ultra-dense phosphorous delta-doping layers in silicon
All Physics Faculty Publications
  • T. -C. Shen, Utah State University
Document Type
Presentation
Publication Date
10-30-2001
Citation Information
Talk at 48th International Symposium of AVS, San Francisco, California, 10/30/2001. “Growth and electrical characterization of ultra-dense phosphorous delta-doping layers in silicon ”