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Presentation
Atom-scale electronics based on dopant patterns in silicon
All Physics Faculty Publications
  • T. -C. Shen, Utah State University
Document Type
Presentation
Publication Date
6-4-2004
Citation Information
Talk at The 48th international conference on electron, ion and photon beam technology & nanofabrication, San Diego, 6/4/2004. “Atom-scale electronics based on dopant patterns in silicon”