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Presentation
Fabrication of nanoscale oxide patterns on Si(100) surface in UHV
All Physics Faculty Publications
  • T. -C. Shen, Utah State University
Document Type
Presentation
Publication Date
10-17-1995
Citation Information
Talk at American Vacuum Society 42nd National Symposium, Minneapolis, 10/17/95. “Fabrication of nanoscale oxide patterns on Si(100) surface in UHV”