"Preparation of atomically flat Si(100) surface by ion etching" by J. Kim

Selected Works of T. -C. Shen

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Preparation of atomically flat Si(100) surface by ion etching

All Physics Faculty Publications (2002)

J. Kim
J. -Y. Ji
T. -C. Shen, Utah State University
J. S. Kline
J. R. Tucker

Keywords

atomically flat,
surface,
ion etching

Publication Date

November 7, 2002

Citation Information

Talk at 49th International Symposium of AVS, Denver, Colorado, 11/7/2002. “Preparation of atomically flat Si(100) surface by ion etching,” presented by J. Kim, J.-Y. Ji, T.-C. Shen, J. S. Kline, J. R. Tucker