Skip to main content
Presentation
Fabrication of Atom-scale Devices by Patterning Donor delta-layers in Silicon
All Physics Faculty Publications
  • T. -C. Shen, Utah State University
Document Type
Presentation
Publication Date
5-25-2006
Citation Information
Molecular Foundry Workshop at Lawrence Berkeley National Laboratory, Berkeley, CA, 5/25/06, (poster) “Fabrication of Atom-scale Devices by Patterning Donor delta-layers in Silicon”