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Contribution to Book
Nanometer scale MOSFETs and STM patterning on Si
Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials (1994)
  • J. R. Tucker
  • C. Wang
  • J. W. Lyding
  • T. -C. Shen, Utah State University
  • G. C. Abeln
Keywords
  • nanometer,
  • MOSFET,
  • STM,
  • patterning,
  • silicon
Publication Date
January 1, 1994
Citation Information
J. R. Tucker, C. Wang, J. W. Lyding, T.-C. Shen, and G. C. Abeln, "Nanometer scale MOSFETs and STM patterning on Si," in Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials, Yokohama, 322, (1994).