Contribution to Book
Selected Area Processing
Thin Film Processes II
(1991)
Abstract
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.
Keywords
- thin films,
- etching processes
Disciplines
Publication Date
1991
Editor
John L. Vossen and Werner Kern
Publisher
Academic Press
ISBN
978-0-08-052421-4
DOI
10.1016/B978-0-08-052421-4.50001-0
Citation Information
Thomas M. Mayer and Susan D. Allen. "Selected Area Processing" San Diego, CAThin Film Processes II (1991) p. 621 - 670 Available at: http://works.bepress.com/susan_davis_allen/14/