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Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment
Journal of Vacuum Science and Technology B (2010)
  • Stephen Kelty , Seton Hall University
  • D. Giubertoni
  • M. G. Pepponi
  • S. Gennaro
  • M. Bersani
  • M. Kah
  • K.J. Kirkby
  • R. Doherty
  • M.A. Foad
  • F. Meirer
  • C. Streli
  • J.C. Woicik
  • Mehmet A. Sahiner
Disciplines
Publication Date
2010
Citation Information
Stephen Kelty, D. Giubertoni, M. G. Pepponi, S. Gennaro, et al.. "Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment" Journal of Vacuum Science and Technology B Vol. 28 Iss. 1 (2010)
Available at: http://works.bepress.com/stephen_kelty/1/