"Studying the Etch Rates and Selectivity of SiO2 and Al in BHF Solutions" by Meow Yen Sim

Selected Works of Stacy H. Gleixner

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Presentation

Studying the Etch Rates and Selectivity of SiO2 and Al in BHF Solutions

Proceedings of the 16th Annual University/Government/Industry Microelectronics Symposium, IEEE (2006)

Meow Yen Sim
Stacy H. Gleixner, San Jose State University

Disciplines

Other Chemical Engineering and
Other Materials Science and Engineering

Publication Date

2006

Citation Information

Meow Yen Sim and Stacy H. Gleixner. "Studying the Etch Rates and Selectivity of SiO2 and Al in BHF Solutions" Proceedings of the 16th Annual University/Government/Industry Microelectronics Symposium, IEEE (2006)
Available at: http://works.bepress.com/stacy_gleixner/9/