The program assessment strategy of San Jose State University's new interdisciplinary curriculum in Microelectronics Process Engineering is described. Vertical integration of specific class and program learning objectives allows for a clear and efficient method to evaluate the continued growth and improvement of the program. The program assessment process relies on clearly defined and detailed program and course learning objectives that are linked vertically to ABET outcomes. In addition, we discuss briefly the structure of the program and the "hands-on" experience that we provide the students.