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Article
Method to Generate Surfaces with Desired Roughness Parameters
Langmuir
  • Yilei Zhang, Iowa State University
  • Sriram Sundararajan, Iowa State University
Document Type
Article
Publication Date
7-31-2007
DOI
10.1021/la063346h
Abstract

A surface engineering method based on the electrostatic deposition of microparticles and dry etching is described and shown to be able to independently tune both amplitude and spatial roughness parameters of the final surface. Statistical models were developed to connect process variables to the amplitude parameters (center line average and root-mean-square) and a spatial parameter (autocorrelation length) of the final surfaces. Process variables include particle coverage, which affects both amplitude and spatial roughness parameters, particle size, which affects only spatial parameters, and etch depth, which affects only amplitude parameters. Correlations between experimental data and model predictions are discussed.

Comments

Reprinted with permission from Langmuir 23 (2007): 8347–831, doi:10.1021/la063346h. Copyright 2007 American Chemical Society.

Copyright Owner
American Chemical Society
Language
en
Date Available
2014-03-10
File Format
application/pdf
Citation Information
Yilei Zhang and Sriram Sundararajan. "Method to Generate Surfaces with Desired Roughness Parameters" Langmuir Vol. 23 Iss. 16 (2007) p. 8347 - 8351
Available at: http://works.bepress.com/sriram_sundararajan/9/