Article
Atom Scale Characterization of the Near Apex Region of an Atomic Force Microscope Tip
Microscopy and Microanalysis
Document Type
Article
Disciplines
Publication Date
10-1-2010
DOI
10.1017/S1431927610000437
Abstract
Three-dimensional atom probe tomography (APT) is successfully used to analyze the near-apex regions of an atomic force microscope (AFM) tip. Atom scale material structure and chemistry from APT analysis for standard silicon AFM tips and silicon AFM tips coated with a thin film of Cu is presented. Comparison of the thin film data with that observed using transmission electron microscopy indicates that APT can be reliably used to investigate the material structure and chemistry of the apex of an AFM tip at near atomic scales.
Copyright Owner
Microscopy Society of America
Copyright Date
2010
Language
en
File Format
application/pdf
Citation Information
Christopher J. Tourek and Sriram Sundararajan. "Atom Scale Characterization of the Near Apex Region of an Atomic Force Microscope Tip" Microscopy and Microanalysis Vol. 16 Iss. 5 (2010) p. 636 - 642 Available at: http://works.bepress.com/sriram_sundararajan/7/
This article is from Microscopy and Microanalysis 16 (2010): 636–642, doi:10.1017/S1431927610000437. Posted with permission.