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Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches
2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (2009)
  • Nipun Sinha, University of Pennsylvania
  • Rashed Mahameed, University of California, San Diego
  • Chengjie Zuo, University of Pennsylvania
  • Gianluca Piazza, University of Pennsylvania
Abstract

In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN MEMS dual-beam design. With the use of just one switch fabricated right next to, and integrated with the filter, the AlN MEMS filter is effectively turned off and its pass-band transmission is lowered to the out of band level at 279.9 MHz.

Keywords
  • MEMS switch,
  • AlN,
  • Integration
Publication Date
2009
Citation Information
Nipun Sinha, Rashed Mahameed, Chengjie Zuo and Gianluca Piazza. "Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches" 2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (2009)
Available at: http://works.bepress.com/sinha/7/