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Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators
Departmental Papers (ESE)
  • Chengjie Zuo, University of Pennsylvania
  • Nipun Sinha, University of Pennsylvania
  • Marcelo B. Pisani, University of Pennsylvania
  • Carlos R. Perez, University of Pennsylvania
  • Rashed Mahameed, University of Pennsylvania
  • Gianluca Piazza, University of Pennsylvania
This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (A1N) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 – 271 MHz), narrow bandwidth (~0.3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3 ~110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.
Document Type
Conference Paper
Date of this Version
Copyright 2007 IEEE. Reprinted from IEEE Ultrasonics Symposium, November 2007, pages 1158-1159.
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  • aluminum nitride (A1N),
  • contour-mode resonator,
  • channel-select filter,
  • microelectromechanical systems (MEMS)
Citation Information
Chengjie Zuo, Nipun Sinha, Marcelo B. Pisani, Carlos R. Perez, et al.. "Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators" (2007)
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