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Article
Etching of Pyrex glass substrates by inductively coupled plasma reactive ion etching for micro/nanofluidic devices
Journal of Vacuum Science & Technology B (2006)
  • Hyun Chul Jung
  • Wu Lu
  • Shengnian Wang
  • L. James Lee
  • Xin Hu
Disciplines
Publication Date
January 1, 2006
DOI
10.1116/1.2388959
Citation Information
Hyun Chul Jung, Wu Lu, Shengnian Wang, L. James Lee, et al.. "Etching of Pyrex glass substrates by inductively coupled plasma reactive ion etching for micro/nanofluidic devices" Journal of Vacuum Science & Technology B Vol. 24 Iss. 6 (2006) p. 3162 - 3164
Available at: http://works.bepress.com/shengnian-wang/23/