Top-edge profile control for SU-8 structural photoresist(2003)
Proceedings of the IEEE 15th Biennial University/Government/Industry Microelectronics Symposium, Boise, Idaho, June 30 - July 2, 2003.
- profile control,
- structural photoresist
Citation InformationSang Joon John Lee, W. Shi, P. Maciel and S. W. Cha. "Top-edge profile control for SU-8 structural photoresist" (2003)
Available at: http://works.bepress.com/sangjoonjohn_lee/20/