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Selected Works of Sang-Joon John Lee
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Top-edge profile control for SU-8 structural photoresist
(2003)
  • Sang Joon John Lee, San Jose State University
  • W. Shi, San Jose State University
  • P. Maciel
  • S. W. Cha, Stanford University
Link
Abstract

Proceedings of the IEEE 15th Biennial University/Government/Industry Microelectronics Symposium, Boise, Idaho, June 30 - July 2, 2003.

Keywords
  • profile control,
  • structural photoresist
Disciplines
Publication Date
2003
Comments
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Citation Information
Sang Joon John Lee, W. Shi, P. Maciel and S. W. Cha. "Top-edge profile control for SU-8 structural photoresist" (2003)
Available at: http://works.bepress.com/sangjoonjohn_lee/20/