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Quantitative Depth Profiling of Layered Samples Using Phase-Modulation FT-IR Photoacoustic Spectroscopy
Applied Spectroscopy
  • Roger W. Jones, Iowa State University
  • John F. McClelland, Iowa State University
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In phase-modulation FT-IR spectroscopy, all wavelengths in a spectrum are modulated at the same frequency and in phase. This factor makes the use of photoacoustic phase data for depth profiling samples much easier in phase modulation than in rapid scan. A method to quantitatively measure layer thickness by using the phase of a substrate spectrum peak is demonstrated with a series of samples consisting of thin polymer films on substrates. Additions to the basic method are demonstrated that extend its application to cases where the substrate peak is overlapped by a spectrum peak of the surface film. A linear relationship between phase angle and layer thickness extending to thicknesses greater than twice the thermal diffusion length is demonstrated. Representations of phase modulation data as a family of angle-specific spectra, as magnitude vs. phase curves, and as a power spectrum and phase spectrum pair, each of which is useful for different aspects of depth profiling, are discussed. Calculating these representations from a single pair of orthogonal interferograms is described.

This paper was published in Applied Spectroscopy 50 (1996): 1258 and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: doi:10.1366/0003702963905015.

Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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Society for Applied Spectroscopy
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Roger W. Jones and John F. McClelland. "Quantitative Depth Profiling of Layered Samples Using Phase-Modulation FT-IR Photoacoustic Spectroscopy" Applied Spectroscopy Vol. 50 Iss. 10 (1996) p. 1258 - 1263
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