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Article
Compositionally Dependent Si 2p Binding Energy Shifts in Silicon Oxynitride Thin Films
Journal of the American Ceramic Society
  • Richard K. Brow, Missouri University of Science and Technology
  • Carlo G. Pantano
Abstract

The Si 2p binding energies measured from a series of silicon oxynitride thin films are related to the nitrogen contents of the films using a simple Pauling charge distribution model. The linear relation found between the binding energy and the calculated charge is expected if Si-N bonds replace Si-O bonds as the nitrogen content of the films is increased.

Department(s)
Materials Science and Engineering
Sponsor(s)
National Science Foundation (U.S.)
Comments
Supported by the National Science Foundation under Grant No. DMR–8119476
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 1986 John Wiley & Sons, All rights reserved.
Publication Date
4-1-1986
Publication Date
01 Apr 1986
Citation Information
Richard K. Brow and Carlo G. Pantano. "Compositionally Dependent Si 2p Binding Energy Shifts in Silicon Oxynitride Thin Films" Journal of the American Ceramic Society Vol. 69 Iss. 4 (1986) p. 314 - 316 ISSN: 0002-7820; 1551-2916
Available at: http://works.bepress.com/richard-brow/25/