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Article
A Mathematical Model for Electroless Copper Deposition on Planar Substrates
Journal of the Electrochemical Society
  • M. Ramasubramanian, University of South Carolina - Columbia
  • Branko N Popov, University of South Carolina - Columbia
  • Ralph E White, University of South Carolina - Columbia
  • K. S Chen
Publication Date
1-1-1999
Document Type
Article
Subject Area(s)
Chemical Engineering
Disciplines
Abstract
A mathematical model for the electroless deposition of copper on a planar electrode is presented and used to make time-dependent predictions on the various quantities in the system. The model takes into account mass transport by diffusion and migration, Butler-Volmer kinetics at the electrode surface, and mixed potential theory. A finite difference approach is used to solve the equations, and the resultant model is used to predict the concentration profiles, potential response, and plating rate as a function of time and concentration of various reactive components.
Citation Information
M. Ramasubramanian, Branko N Popov, Ralph E White and K. S Chen. "A Mathematical Model for Electroless Copper Deposition on Planar Substrates" Journal of the Electrochemical Society (1999) p. 111 - 116
Available at: http://works.bepress.com/ralph_white/253/