Presentation
Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species
Mechanical Engineering Conference Presentations, Papers, and Proceedings
Document Type
Conference Proceeding
Disciplines
Conference
2007 MRS Meeting
Publication Date
1-1-2007
DOI
10.1557/PROC-1052-DD05-10
Geolocation
(42.3584308, -71.0597732)
Abstract
A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance.
Copyright Owner
Materials Research Society
Copyright Date
2008
Language
en
Citation Information
Kyungho Kang and Pranav Shrotriya. "Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species" Boston, MA(2007) Available at: http://works.bepress.com/pranav_shrotriya/26/
This is a conference proceeding from 2007 MRS Fall Meeting 1052 (2007): 171, doi:10.1557/PROC-1052-DD05-10. Posted with permission.